Mike Deal is a Senior Research Scientist in the Center for Integrated Systems at Stanford University. In in addition to doing research and directing graduate students, he works for the Stanford Nanofabrication Facility (SNF) as Director of Special Programs. There he directs the Remote User program, the Research Experience for Undergraduates program, and the MEMS-Exchange program, and helps with education and outreach for SNF and is a Technical Liaison. He also has occasional teaching duties in the departments of EE and MS&E. Mike developed the SUPREM 3.5 and SUPREM-IV.GS process simulators for GaAs technology. Current research interests include nanoelectronics, and chemistry and materials aspects of advanced integrated circuit fabrication, including advanced gate structures and nanowires.
Mike received the A.B. degree in chemistry from Occidental College in Los Angeles, and the M.S. and PhD. degrees in Materials Science and Engineering from Stanford University. He worked two years as a Senior Staff Scientist in R&D at American Microsystems, Inc. in Santa Clara, CA, developing silicide and aluminum metallizations for CMOS technology, before returning to Stanford. Along with Jim Plummer and Peter Griffin, Mike co-authored the textbook "Silicon VLSI Technology - Fundamentals, Practice and Modeling" published in 2000 by Prentice Hall.
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