Michael Deal is a Senior Research Scientist at Stanford University, where he has worked for the
past 30 years . In addition to directing graduate students in their Ph.D.
research in Prof. Yoshio Nishi’s group in the EE Department, he works for the
Stanford Nanofabrication Facility (SNF). There he is Director of Education and
Outreach, leads the equipment training film production, and is a technical
liaison for the lab.
In his education and outreach work, he directs the Research Experience
for Undergraduates (REU) summer program,
coordinates SNF outreach activities including giving tours and presentations to
school classes (including via webcams to remote locations), and has been part of
the McREL NanoLeap and NanoTeach programs on nanotechnology curriculum and
professional development for high schools.
He also has occasional teaching duties in the departments of EE and MS&E.
Previously Mike developed the SUPREM 3.5 and SUPREM-IV.GS process
simulators for GaAs technology. Current research interests include
nanoelectronics and the chemistry and materials aspects of nanodevice
fabrication, including advanced transistors.
Mike received the A.B. degree in chemistry from Occidental College
in Los Angeles, and the M.S. and Ph.D. degrees in
Materials Science and Engineering from Stanford University.
After graduation, he worked as a Senior Staff Scientist in R&D at American
Microsystems, Inc. in Santa Clara,
CA, developing silicide and
aluminum metallizations for CMOS technology, before returning to Stanford. Along
with Prof. James Plummer (former Dean of Engineering, Stanford University)
and Dr. Peter Griffin, Dr. Deal co-authored the textbook "Silicon VLSI
Technology - Fundamentals, Practice and Modeling" published by Prentice Hall.
Click here for list of publications.
Stanford, CA 94305-4070
Phone: (650) 725-3607
FAX: (650) 723-4659
Position: Senior Research Scientist and SNF Director of Education and Outreach
People I Work With: